Vector Extreme
Lam 12-inch thin film deposition equipment can be configured with up to 3 process cavities and can simultaneously process 12 wafers. Double manipulator transfer structure for faster transfer efficiency.
分享
相關(guān)產(chǎn)品
描述
Product Features
1. Optional dual hard disk automatic backup system to ensure data security.
2. Different process cavities can be selected.
